Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
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United States of America Patent
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Apr 25, 2006
Issued Date -
N/A
app pub date -
Aug 17, 2004
filing date -
Jan 18, 2000
priority date (Note) -
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Abstract
A Vacuum transport chamber for disk-shaped substrates, has a base plate structure has an interior surface which borders an interior of the chamber on one side thereof. A covering structure is situated parallel and opposite an interior surface of the base plate structure. The structure has at least two substrate passage openings which are adapted to a substrate disk surface. A transport device which is rotationally drivingly movable about a rotation axis perpendicular to the base plate structure. At least one substrate receiving device is brought into alignment with a respective one of the openings. A controlled sealing arrangement establishes an edge of at least one of the openings with the substrate holding device brought into alignment therewith and a substrate provided thereon.
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