Stack-film trench capacitor and method for manufacturing the same
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United States of America Patent
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Apr 18, 2006
Issued Date -
N/A
app pub date -
Oct 15, 2004
filing date -
Nov 13, 2002
priority date (Note) -
Expired
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Abstract
A trench capacitor includes an electrode having a first conductive area formed in a trench provided in a substrate, and a second conductive area extending from a bottom of the trench, the second conductive area being electrically coupled to the first conductive area and spaced apart from the first conductive area; a storage node having a first conductive extension extending into a first dielectric space provided between the first conductive area and the second conductive area of the electrode, and a second conductive extension extending into a second dielectric space provided within the second conductive area of the electrode; and a dielectric layer electrically insulating the electrode from the storage node.
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