Modular substrate measurement system
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United States of America Patent
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Apr 18, 2006
Grant Date -
Jun 5, 2003
app pub date -
Apr 12, 2001
filing date -
Apr 13, 2000
priority date (Note) -
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Abstract
A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.
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