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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SCHOTT AG	55122 MAINZ

International Classification(s)

• G01F:MEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUI....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Becker, Hans	Meiningen, DE	42	668
Buttgereit, Ute	Zella-Mehlis, DE	13	238
Chey, S Jay	Ossining, NY	36	714
Goetzberger, Oliver	Meiningen, DE	6	188
Hess, Gunter	Meiningen, DE	12	133
Renno, Markus	Meiningen, DE	10	257
Schmidt, Frank	Jena, DE	173	1805
Sobel, Frank	Meiningen, DE	11	251

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 18, 2006	US,7029803,B2   US7029803B2	GRANTED PATENT AS SECOND PUBLICATION
March 10, 2005	US,20050053845,A1   US20050053845A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7029803

Attenuating phase shift mask blank and photomask

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