Method and apparatus for supporting a substrate
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United States of America Patent
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-
Apr 18, 2006
Grant Date -
Dec 25, 2003
app pub date -
Mar 21, 2003
filing date -
Jun 19, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate, and a device coupled to the frame that performs an operation on a surface of the substrate.
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