Vacuum system with separable work piece support
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United States of America Patent
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Apr 11, 2006
Grant Date -
May 9, 2002
app pub date -
Sep 5, 2001
filing date -
Sep 5, 2000
priority date (Note) -
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Abstract
A vacuum system for the treatment of work pieces has an evacuatable treatment chamber having a centrally disposed low voltage arc discharge arrangement and laterally disposed loading opening. A coupling device between the work piece support and a receiving device on the system side allows simplified loading and removal of the work pieces to be treated along with the support by simply lifting onto or lowering from the receiving device.
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