Monomers, polymers, methods of synthesis thereof and photoresist compositions
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United States of America Patent
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Apr 4, 2006
Grant Date -
Jan 31, 2002
app pub date -
Feb 26, 2001
filing date -
Feb 26, 2000
priority date (Note) -
Expired
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Abstract
The present invention provides novel alicyclic-esterified norbornene carboxylates monomers, polymers and photoresist compositions that comprise the polymers as a resin binder component. Methods for synthesis of the monomers and polymers of the invention are also provided. The photoresist compositions of the invention can provide highly resolved relief images upon exposure to short wavelengths, including sub-300 and sub-200 nm wavelengths such as 193 nm and 157 nm.
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