Beam-type accelerometer
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United States of America Patent
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Apr 4, 2006
Grant Date -
N/A
app pub date -
May 4, 1998
filing date -
May 7, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An accelerometer has a cantilever beam supported at one end and having an opposite free end with a longitudinal direction between the supported end and the free end, the beam being formed of a piezoelectric layer and a supporting layer. An inertial, sensing mass is mounted at the free end of the beam, and is located eccentrically relative to the longitudinal direction of the beam. The accelerometer has a primary direction of sensitivity to acceleration forces, and a secondary direction of sensitivity, which is orthogonal to the primary direction and in which the sensitivity is negligible. The secondary direction forms an angle relative to the longitudinal direction of the beam such that a line coinciding with a force proceeding through the center of gravity of the inertial mass, and which is directed in the secondary direction, also intersects the beam.
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