Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
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United States of America Patent
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Mar 21, 2006
Issued Date -
N/A
app pub date -
Jul 23, 2003
filing date -
Jan 23, 2001
priority date (Note) -
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Abstract
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
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