Method for removing harmful components in an exhaust gas
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United States of America Patent
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Feb 28, 2006
Issued Date -
N/A
app pub date -
Sep 25, 2002
filing date -
Jun 18, 1998
priority date (Note) -
Expired
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Abstract
A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment. The method also includes the step of thermally decomposing the resulting mixed gas in a non-oxidizing atmosphere.
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