Method and apparatus for determining characteristics of a laser beam spot
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United States of America Patent
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Feb 21, 2006
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N/A
app pub date -
Mar 6, 2003
filing date -
Sep 14, 1999
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Abstract
A method of determining the dimensions of a laser beam spot, comprising: scanning the laser beam in a path across a reference-edge having a photodetector positioned therebehind; and measuring an output signal from the photodetector during the scanning, the output signal corresponding to an area of the laser beam spot incident on the photodetector during the scanning. A method of aligning a laser beam delivery system, the method comprising: positioning a measurement/alignment tool at a target location; firing the laser beam on the tool; observing the laser beam using the tool; and adjusting the system in response to the sensed laser beam.
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