Power assisted automatic supervised classifier creation tool for semiconductor defects

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United States of America Patent

PATENT NO 6999614
SERIAL NO

09724633

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bakker, David Cupertino, CA 7 77
Banerjee, Saibal Fremont, CA 21 881
Smith, Ian R Los Gatos, CA 25 992

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