Power assisted automatic supervised classifier creation tool for semiconductor defects
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United States of America Patent
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Feb 14, 2006
Grant Date -
N/A
app pub date -
Nov 28, 2000
filing date -
Nov 29, 1999
priority date (Note) -
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Abstract
A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.

First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
KLA-TENCOR CORPORATION | ONE TECHNOLOGY DRIVE MILPITAS CA 95035 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Bakker, David | Cupertino, CA | 7 | 77 |
Banerjee, Saibal | Fremont, CA | 21 | 881 |
Smith, Ian R | Los Gatos, CA | 25 | 992 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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