Tunable fabry-perot filter

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United States of America Patent

PATENT NO 6996312
APP PUB NO 20040218865A1
SERIAL NO

10425509

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Abstract

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A tunable Fabry Perot filter (TFPF) uses the hybrid integration of MEMS and micro-optics. The mirrors forming the TFPF are actively aligned to provide a high finesse TFPF. One of the reflectors is mounted to a flexible member, for example a beam member fixed at both ends. The flexible member is deflectable in a direction parallel to the axis of the TFPF so as to adjust the gap between the reflectors, thus tuning the TFPF. One or both of the mirrors may be deposited on the end of an optical fiber.

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Patent Owner(s)

Patent OwnerAddress
ROSEMOUNT INC6021 INNOVATION BOULEVARD SHAKOPEE MN 55379

International Classification(s)

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  • 2003 Application Filing Year
  • G02B Class
  • 4878 Applications Filed
  • 2092 Patents Issued To-Date
  • 42.89 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2003200420052006200720082009201020112012201320142015201620170255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lu, Liang-Ju Eden Prairie, MN 42 1590

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges276563821937767492121652701 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050100150200250300350400450500550600650700

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