Clamping element with an integrated force sensor
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United States of America Patent
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Feb 7, 2006
Grant Date -
Feb 12, 2004
app pub date -
Jun 24, 2003
filing date -
Jun 28, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A clamping element for the transport of a substrate in a predefined transport direction comprises a first and a second leg with a first and second clamping jaw for clamping a substrate. Each of the two clamping jaws has a clamping plate which is movable in transport direction relative to the corresponding leg. A sensor measures the deflection of the first clamping plate relative to the first leg. As soon as the measured deflection exceeds a predefined threshold value, the clamping element is opened.
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