Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminesce device
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United States of America Patent
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Jan 31, 2006
Grant Date -
Oct 16, 2003
app pub date -
Mar 18, 2003
filing date -
Mar 26, 2002
priority date (Note) -
Expired
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Abstract
A method for measuring a relative thickness distribution of an organic thin film for use in an organic electroluminescence device comprises the steps of irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, measuring the intensity of a fluorescence produced by the organic thin film in response to the light irradiation, and obtaining a film thickness of the predetermined region from the intensity of the fluorescence. Further, an apparatus for measuring a thickness distribution for use in an organic electroluminescence device has means for irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, means for measuring the intensity of a fluorescence produced by the organic thin film, and means for obtaining the film thickness of the predetermined region from the intensity of the fluorescence.
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