Vacuum pump
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United States of America Patent
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Jan 31, 2006
Grant Date -
Sep 18, 2003
app pub date -
Mar 10, 2003
filing date -
Mar 13, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum pump apparatus has a casing and a base connected to the casing. The base has an opening communicating with an interior space of the casing. A heater is mounted on the base for heating the base to maintain a gas discharge path at a temperature high enough to prevent solidification of processed gas in the vacuum pump. A cover member covers the opening of the base. The cover member has a first surface communicating with the interior space of the casing and a second surface exposed to the exterior of the vacuum pump. A substrate is connected to the first surface of the cover member and has at least one circuit for controlling operation of the vacuum pump.
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