Sample observation method and transmission electron microscope

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United States of America Patent

PATENT NO 6982420
APP PUB NO 20040114788A1
SERIAL NO

10720251

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Abstract

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Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECHNOLOGIES CORPORATION24-14 NISHI SHIMBASHI 1-CHOME MINATO-KU TOKYO 1058717 ?1058717
HITACHI SCIENCE SYSTEMS LTDHITACHINAKA-SHI IBARAKI-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagaoki, Isao Hitachinaka, JP 31 174
Nakazawa, Eiko Mito, JP 22 64

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