ALN material and electrostatic chuck incorporating same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 3, 2006
Grant Date -
Jun 24, 2004
app pub date -
Dec 23, 2002
filing date -
Dec 23, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500V less than about 5. In this regard, ρ10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ500V represents the resistivity of the AlN material at 500 applied volts.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SAINT-GOBAIN CERAMICS & PLASTICS INC | ONE NEW BOND STREET WORCESTER MA 01615-0138 |
International Classification(s)

- 2002 Application Filing Year
- B23B Class
- 445 Applications Filed
- 195 Patents Issued To-Date
- 43.83 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
LaCourse, Brian C | Pepperell, MA | 16 | 96 |
# of filed Patents : 16 Total Citations : 96 | |||
Vartabedian, Ara | Hudson, MA | 7 | 92 |
# of filed Patents : 7 Total Citations : 92 | |||
Zandi, Morteza | Shrewsbury, MA | 15 | 134 |
# of filed Patents : 15 Total Citations : 134 |
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Patent Citation Ranking
- 9 Citation Count
- B23B Class
- 6.44 % this patent is cited more than
- 19 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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