ALN material and electrostatic chuck incorporating same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6982125
APP PUB NO 20040121192A1
SERIAL NO

10327722

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500V less than about 5. In this regard, ρ10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ500V represents the resistivity of the AlN material at 500 applied volts.

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Patent Owner(s)

Patent OwnerAddress
SAINT-GOBAIN CERAMICS & PLASTICS INCONE NEW BOND STREET WORCESTER MA 01615-0138

International Classification(s)

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  • 2002 Application Filing Year
  • B23B Class
  • 445 Applications Filed
  • 195 Patents Issued To-Date
  • 43.83 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2002200320042005200620072008200920100255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LaCourse, Brian C Pepperell, MA 16 96
Vartabedian, Ara Hudson, MA 7 92
Zandi, Morteza Shrewsbury, MA 15 134

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Patent Citation Ranking

  • 9 Citation Count
  • B23B Class
  • 6.44 % this patent is cited more than
  • 19 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges19190512183301 - 1011 - 2021 - 3031 - 4041 - 5051 - 600102030405060708090100110120130140150160170180190200

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