Tungsten plug corrosion prevention method using gas sparged water
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United States of America Patent
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Dec 20, 2005
Grant Date -
Apr 28, 2005
app pub date -
Oct 28, 2003
filing date -
Oct 28, 2003
priority date (Note) -
Expired
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Abstract
Disclosed herein is a method of making integrated circuits. In one embodiment the method includes forming tungsten plugs in a integrated circuit and forming electrically conductive interconnect lines after formation of the tungsten plugs, wherein at least one tungsten plug is electrically connected to at least one electrically conductive interconnect line. Separate from the formation of the tungsten plugs and electrically conductive interconnect lines, a gas is introduced into a liquid. At least one electrically conductive interconnect line is then contacted with the gas introduced liquid.
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