Multilayer electrically conductive anti-reflective coating
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United States of America Patent
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Dec 13, 2005
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N/A
app pub date -
Oct 27, 1998
filing date -
Oct 29, 1997
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Expired
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Abstract
The present invention comprises a multilayer inorganic anti-reflective coating with predetermined optical properties, for application on a flexible substrate. The coating comprises a stack consisting of five material layers, whereby the third layer is a dummy layer consisting of an electrically conductive material, preferably indium-tinoxyde, which provides the coating with an adjustable electrical sheet resistance of between 25 and 2000 Ω/sq without thereby influencing its optical properties. The anti-reflective coating can be applied onto a flexible substrate (e.g. a polymer film) by means of a single 12 or double pass vacuum magnetron sputtering operation.
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