Thin film formation use sputtering target material, thin film formed using same, and optical recording medium
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United States of America Patent
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Dec 6, 2005
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N/A
app pub date -
Oct 29, 1999
filing date -
Oct 29, 1999
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Abstract
An alloy material, a thin film and an optical recording medium to achieve various tasks such as maintenance of a high reflectivity, improved corrosion resistance, simplified production of the alloy, and realization of stability and simplicity/easiness of a sputtering process when being used as a sputtering target. An AgPd alloy including Ag as a main component and Pd in the range of 0.5 to 4.9 atomic % is used as a thin film formation use sputtering target material, with the target material a thin film, that is a reflecting film, constituting an optical recording medium is formed and the optical recording medium containing the reflecting film as a constituent is produced.
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