Arrangement for holding a particle beam apparatus
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United States of America Patent
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Nov 29, 2005
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N/A
app pub date -
Jul 7, 2003
filing date -
Jul 7, 2003
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Abstract
An arrangement for holding a particle beam apparatus such as a transmission electron microscope. The arrangement is sufficient for receiving a good resolution in the area of 1 Å or less, said arrangement still being under more or less no influence of the environment, in particular, building vibrations. In one embodiment, the arrangement comprises a base structure comprising a plurality of hollow bodies, at least one of said hollow bodies having a first length extension in a first direction, a second length extension in a second direction and a third length extension in a third direction, said first length extension being larger than said second and third length extensions, and wherein a cross section of said at least one of said hollow bodies perpendicular to said first direction is substantially triangular. Due to the hollow body shape, a very stiff structure is provided with a very good eigenfrequency.
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