Coating thickness control using surface features
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United States of America Patent
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-
Nov 22, 2005
Grant Date -
Sep 9, 2004
app pub date -
Mar 6, 2003
filing date -
Mar 6, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
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