Vacuum sensor
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United States of America Patent
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Nov 15, 2005
Grant Date -
Apr 29, 2004
app pub date -
Jan 31, 2002
filing date -
Mar 20, 2001
priority date (Note) -
Expired
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Abstract
An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump (25) and them referencing the sensor response to the chamber gas during the evacuation cycle.
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