Low dielectric constant layers
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United States of America Patent
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Nov 8, 2005
Grant Date -
Oct 21, 2004
app pub date -
Jul 15, 2002
filing date -
Jul 18, 2001
priority date (Note) -
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Abstract
This invention relates to low dielectric constant layers formed on the substrate having: (a) a base zone, adjacent the substrate, having pores distributed therein, at least the majority of the pores having diameters in the range 1 to 10 nm; (b) an atomically smooth surface zone, spaced from the substrate; and (c) an intermediate zone having pores distributed therein, at least the majority of the pores having diameters equal to or less than 2 nm so that there is a general reduction in pore size from the bottom of the layer towards the top.
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