Method and device for drying substrate
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United States of America Patent
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Nov 8, 2005
Grant Date -
N/A
app pub date -
Aug 10, 1999
filing date -
Jan 18, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
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