SPM sensor and process for producing it
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United States of America Patent
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Oct 25, 2005
Grant Date -
Mar 11, 2004
app pub date -
Mar 10, 2003
filing date -
Mar 20, 2002
priority date (Note) -
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Abstract
SPM sensor comprising a holding element, cantilever and a sensor tip, which projects out of the surface of the cantilever, at the free end of the cantilever, at least the cantilever and the three-surface sensor tip consisting of monocrystalline (100)-silicon, and a process for producing this sensor. The process is distinguished by inexpensive process steps, substantially wet-chemical etching steps. The result is that an SPM sensor with a rectangular cantilever arm having a tip which may or may not project beyond the free end is produced from a single piece.
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