MEMS based charged particle deflector design
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United States of America Patent
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Oct 18, 2005
Grant Date -
Sep 15, 2005
app pub date -
Nov 12, 2004
filing date -
Mar 12, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microcolumn including a plurality of beam modification components coupled to an assembly substrate, wherein the plurality of beam modification components includes: (1) an extractor component; (2) a first focusing electrode component; (3) a first anode component; (4) a first deflector component; (5) a second focusing electrode component; (6) a second deflector component; (7) a third focusing electrode component; (8) a third deflector component; (9) a second anode component; (10) a fourth focusing electrode component; and (11) a third anode component. The beam modification components may be ordered on the substrate in this sequence or other sequences.
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