Tunable MEMS capacitor
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United States of America Patent
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Oct 11, 2005
Grant Date -
N/A
app pub date -
Aug 4, 2004
filing date -
Nov 21, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor (368) having a pair of stationary capacitor electrodes (392) that are fixed to and disposed the same distance above a substrate (388) in the vertical dimension. A tuning element (416) is suspended above the substrate (388) by an elevation system (460) that accommodates movement of the tuning element (416) in the vertical dimension. Changing the capacitance of the tunable capacitor (368) is accomplished by moving the tuning element (416) in the vertical dimension.
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