Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ASML NETHERLANDS B V	P O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
De, Smit Joannes Theodoor	Eindhoven, NL	50	5946
Derksen, Antonius Theodorus Anna Maria	Eindhoven, NL	56	3384
Hoogendam, Christiaan Alexander	Veldhoven, NL	205	9950
Kolesnychenko, Aleksey	Nijmegen, NL	35	3183
Lof, Joeri	Eindhoven, NL	94	8170
Loopstra, Erik Roelof	Heeze, NL	325	13468
Modderman, Theodorus Marinus	Nuenen, NL	39	4357
Mulkens, Johannes Catharinus Hubertus	Maastricht, NL	213	10886
Ritsema, Roelof Aeilko Siebrand	Eindhoven, NL	37	4991
Simon, Klaus	Eindhoven, NL	89	7360
Straaijer, Alexander	Eindhoven, NL	87	8017
Streefkerk, Bob	Tilburg, NL	201	10575
Van, Santen Helmar	Amsterdam, NL	101	4784

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 04, 2005	US,6952253,B2   US6952253B2	GRANTED PATENT AS SECOND PUBLICATION
October 21, 2004	US,20040207824,A1   US20040207824A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 6952253

Lithographic apparatus and device manufacturing method

---

 

Legal Events