Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith
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United States of America Patent
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Sep 20, 2005
Grant Date -
Dec 16, 2004
app pub date -
Mar 26, 2004
filing date -
Mar 28, 2003
priority date (Note) -
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Abstract
A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
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