Importance

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Abstract

A first software program for simulating an operating laser system controls a processor that generates one or more dummy parameters each corresponding to a parameter of an operating laser system. The dummy parameter is read over a same or similar signal interface as the operating laser system by a processor running a test software subroutine having the laser system parameter as an input. An algorithm including the test software subroutine then generates an output command based on the value of the dummy parameter. A second software program for efficiently scheduling laser service routines based on a predetermined lithography system schedule controls a processor that reads the lithography system schedule including scheduled system downtimes, wherein the scheduled downtimes include start times and durations. The processor then reads a time window and duration for each of one or more scheduled laser service routines. The processor then determines a start time for each scheduled laser service routine within the time window of the service routine, wherein the start times are selected to collectively maximize temporal overlap of the scheduled laser service routine durations and scheduled system downtime durations. A third software program including a flow control kernel controls a processor to receive a unique command from one of multiple external software control programs corresponding to a function of a laser system and input the unique command to the flow control kernel. The flow control kernel outputs a generic command that is the same for each unique input command of the multiple external software control programs corresponding to the same laser system function. The generic command or command sequence is then input to a generic control module corresponding to the laser system function.

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First Claim