Inspection status display method
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United States of America Patent
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-
Sep 6, 2005
Grant Date -
May 20, 2004
app pub date -
Mar 13, 2003
filing date -
Nov 15, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An object of this invention is to confirm the content of a defect in real time. A defect image, corresponding master pattern image, failure designation button, nondefective designation button, dust designation button, piece number, piece coordinates, and the type of defect are displayed within a defect image region in an inspection status display window. When the nondefective designation button or dust designation button is selected, the inspecting apparatus recognizes that a defect corresponding to the selected button is negligible, and changes the inspection result of this defect from the defect to a nondefective.
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