Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations
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United States of America Patent
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Aug 30, 2005
Grant Date -
Mar 18, 2004
app pub date -
Aug 11, 2003
filing date -
Feb 10, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A measurement device, i.e. a metrology tool, and a vehicle are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit, for, e.g., FOUPs in semiconductor manufacturing, an electronic control system with, e.g., a PC, monitor, and keyboard and optionally a vacuum pump is also provided in module frames of the vehicle. The measurement configuration particularly reduces bottleneck situations in equipment qualifying of processing tools during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool. With the possible exception of power supply or operator control, the measurement configuration can operate fully autonomously.
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