Plasma processing apparatus for monitoring and storing lifetime usage data of a plurality of interchangeable parts
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United States of America Patent
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Aug 23, 2005
Grant Date -
Sep 9, 2004
app pub date -
Jan 13, 2004
filing date -
Feb 6, 2003
priority date (Note) -
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Abstract
A plasma processing apparatus capable of making an accurate lifetime assessment for each of plural consumable parts (the definition of 'the consumable part' is an electrode and/or a nozzle) so that effective use of the consumable parts becomes possible leading to reduced running cost. In the plasma processing apparatus, a plasma arc is generated from a plasma torch composed of an electrode and a nozzle to perform plasma work on a workpiece. Such a plasma processing apparatus includes a plurality of consumable parts, each consumable part being an electrode and/or a nozzle, and further comprises a memory for storing consumption data on every consumable part, the consumption data being used for calculation of consumption; and a display unit for displaying consumption calculated by a CPU for selecting the consumption data corresponding to a consumable part in use.
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