Micromechanical resonator having short support beams
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United States of America Patent
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Aug 16, 2005
Grant Date -
Feb 3, 2005
app pub date -
Jul 31, 2003
filing date -
Jul 31, 2003
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Abstract
The illustrative embodiment of the present invention is a vertical-mode, free-free beam resonator, and micromechanical circuits that include one or more such resonators. In accordance with the illustrative embodiment, the resonator comprises a movable beam that overlies a drive electrode. The movable beam is supported by a plurality of supports, the length of which is substantially less than one-quarter of a wavelength of the resonant frequency of the resonator.
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