Method and apparatus for on-wafer testing of an individual optical chip
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United States of America Patent
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Aug 2, 2005
Grant Date -
Jan 22, 2004
app pub date -
Dec 6, 2002
filing date -
Jul 16, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for testing an optical chip, while the optical chip is still on a wafer, utilizing an optical probe, includes the steps of creating an access point on the wafer adjacent the optical chip. The optical chip having a waveguide having an axis. A portion of the waveguide is removed to form the access point such that light exiting the planar optical waveguide is directed in a direction substantially different from the axis of the waveguide. An optical probe is placed along a propagation path of the exiting light to optically couple the optical probe and optical chip.
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