Electrostatic attraction mechanism, surface processing method and surface processing device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 26, 2005
Grant Date -
Feb 14, 2002
app pub date -
Jul 2, 2001
filing date -
Jul 6, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Electrostatic attraction is performed on a plate-shaped object 9 in that an attraction power source 3 applies a voltage to a pair of attraction terminals 23, 24 mounted inside a dielectric block 22, the surface of which is an attraction surface, thereby inducing static electricity in an attraction surface. The attraction power source 3 adjusts the surface potential of a plate-shaped object 9 by independently controlling voltages applied to the respective attraction terminals 23, 24. Processing is carried out on the surface of the plate-shaped object 9 while the injection of charged particles into the plate-shaped object 9 is suppressed. A control part 6 which controls the attraction power source 3 records, in a recording part 62, data obtained by measuring in advance the surface potential of the plate-shaped object 9 while respectively changing the voltage applied to the attraction terminals 23, 24, and controls the attraction power source 3 with a pattern selected in accordance with this data.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2001 Application Filing Year
- H01T Class
- 94 Applications Filed
- 43 Patents Issued To-Date
- 45.75 % Issued To-Date
