Low temperature metal oxide coating formation

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United States of America Patent

PATENT NO 6921707
SERIAL NO

09979929

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Abstract

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A process for forming metal oxides, including mixed metal oxides, in a dilute vapor phase at a temperature below approximately 350 degrees Fahrenheit. The resulting novel oxides can be formed as dense films or coatings with very high strain-to-crack values, or as nanoparticles, depending primarily upon the concentration of the reactants. The novel oxides are formed by the reaction in the vapor phase of reactive metal molecules with atomic oxygen. The reactions are instantaneous at room temperature, which permits this process to be applied to the formation of metal oxides on temperature sensitive substrates. The atomic oxygen and highly reactive metal containing molecules are generated by the application of an effective amount of ultraviolet radiation.

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Patent OwnerAddress
ULTRAMET12173 MONTAGUE STREET A CORPORATION OF CA PACOIMA CA 91331

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Scott, David Bakersfield, CA 193 7016
Zinn, Alfred Palo Alto, CA 2 8

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