Fabrication of Zinc Oxide films on non-planar substrates and the use thereof

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United States of America Patent

PATENT NO 6921552
SERIAL NO

09403505

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Abstract

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A method of manufacture of a substantially continuous circumferential coating on a non-planar substrate, is disclosed the method comprising the steps of: utilising a substantially non directional deposition technique and a substantially static substrate deposition geometry to deposit the coating. Coatings can be deposited which include piezoelectric modulation characteristics or electro-optic modulation characteristics. Ideally the coating has semiconducting properties. The type of coating ideally includes Zinc-Oxide coatings. The non directional deposition technique can comprise chemical vapor deposition via single source chemical vapor deposition. Suitable substrates include optical fibers which are clamped onto a substantially planar heating surface during the deposition. The optical fiber can be clamped at a portion of the length of the fiber which is located at one end of a heating surface during the deposition such that movement of a free end of the optical fiber is limited to movement substantially along the axis of the optical fiber.

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Patent Owner(s)

Patent OwnerAddress
UNISEARCH LIMITEDRUPERT MYERS BUILDING LEVEL 2 GATE 14 BARKER STREET UNSW SYDNEY NSW 2052 AUSTRALIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koch, Michael Herman Erskineville, AU 1 0
Lamb, Robert Norman Engadine, AU 9 288
Mar, Gock Leong Lane Cove, AU 1 0
Timbrell, Peter Yorke Ontario, CA 1 0

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