Method for producing coated workpieces, uses and installation for the method
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United States of America Patent
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Jul 19, 2005
Grant Date -
Jan 9, 2003
app pub date -
Jul 22, 2002
filing date -
Jun 13, 1997
priority date (Note) -
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Abstract
A system and a method produce workpieces coated by PECVD with a quality sufficient for epitaxy. Included are a vacuum recipient, a plasma discharge source operationally connected to the vacuum recipient and a workpiece holder within the vacuum recipient, said plasma discharge source generating on said workpiece holder ions with an energy of below 15 eV. The plasma discharge source can be a low-voltage plasma discharge source in which at least one cathode is arranged within a cathode chamber coupled to the vacuum recipient by a diaphragm.
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