Ring laser scatterometer
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United States of America Patent
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Jun 28, 2005
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N/A
app pub date -
Mar 17, 2003
filing date -
Mar 17, 2003
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Abstract
A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.
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