Method and apparatus for on-wafer testing of an individual optical chip
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United States of America Patent
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Jun 21, 2005
Grant Date -
Jan 22, 2004
app pub date -
Nov 15, 2002
filing date -
Jul 16, 2002
priority date (Note) -
Expired
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Abstract
A method for testing an optical chip, while the optical chip is still on a wafer, utilizing an optical probe, includes the steps of creating an access point on the wafer adjacent the optical chip. Inserting a probe at the access point to optically couple the optical probe and optical chip. The optical probe includes at least a first optical waveguide for changing the direction of input light at the probe to optically couple with the optical chip at the access point.
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