System and method for generating and controlling multiple independently steerable laser beam for material processing
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 21, 2005
Grant Date -
Oct 14, 2004
app pub date -
Apr 10, 2003
filing date -
Apr 10, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently steerable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, a mirror controller for controlling each beamlet steering mirror, and an optical path including a scanning lens for directing each steered beamlet to a target area of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump located in the optical path for intercepting a beamlet steered into the beam dump by the corresponding beamlet steering mirror.
First Claim
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