Magnetic position detection for micro machined optical element
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United States of America Patent
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Jun 14, 2005
Grant Date -
Nov 14, 2002
app pub date -
May 8, 2001
filing date -
May 8, 2001
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Abstract
A property of a magnetic sensor, deployed on a micro machined optical element and exposed to a magnetic field, changes as the position of the micro machined optical element changes with respect to a magnetic field or, alternatively, when the magnetic field changes with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to the position, and a measurement of the property change tracks the change in orientation of a moveable portion of the optical element.
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