Indium or tin bonded megasonic transducer systems
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United States of America Patent
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Jun 14, 2005
Issued Date -
N/A
app pub date -
Jun 27, 2002
filing date -
Apr 23, 2001
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Abstract
A megasonic cleaning system comprised of a container, a resonator, one or more piezoelectric crystals and a bonding layer comprised of indium or tin for attaching the piezoelectric crystal to the resonator. The resonator comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, aluminum, ceramics and stainless steel. The piezoelectric crystal may be attached directly to a side or to the bottom of the container, in which case the container acts as the resonator.
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