Projection objective having adjacently mounted aspheric lens surfaces
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United States of America Patent
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Jun 7, 2005
Grant Date -
Nov 25, 2004
app pub date -
Nov 7, 2003
filing date -
Dec 29, 1999
priority date (Note) -
Expired
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Abstract
A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.
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