Device for measuring the pressure of a fluid
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United States of America Patent
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Jun 7, 2005
Grant Date -
Mar 11, 2004
app pub date -
Jul 23, 2001
filing date -
Jul 31, 2000
priority date (Note) -
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Abstract
A pressure sensing device for measuring the pressure of a fluid, comprising: a measurement diaphragm which is at least partially made of semiconductor material, is provided with a first surface and a second surface which are exposed respectively to a first pressure and to a second pressure, and undergoes a deformation following the application of the first pressure and of the second pressure; and a resonant element made of semiconductor material which is provided with a first end portion and with a second end portion for mechanically coupling the resonant element to the measurement diaphragm, the oscillation frequency of the resonant element varying according to the deformation to which the measurement diaphragm is subjected; and first circuit means for generating a sensing signal which is indicative of the oscillation frequency of the resonant element. Its particularity consisting of the fact that the resonant element comprises second circuit means for increasing the intensity of the sensing signal which is indicative of the oscillation frequency of the resonant element, the second circuit means being integrated with the structure of the resonant element.
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