Connecting structure for vacuum pump
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United States of America Patent
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May 31, 2005
Grant Date -
Feb 20, 2003
app pub date -
Aug 6, 2002
filing date -
Aug 8, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a connecting structure for a vacuum pump, which can block propagation of electrical noise, generated by a main body of the vacuum pump. Between both ends of a connection piping for connecting the vacuum pump to a vacuum chamber of an apparatus to be connected with and evacuated by the vacuum pump, there is interposedly provided an electrical insulating portion formed of an insulating material so as to provide electrical insulation therebetween. The electrical insulation portion may be provided to a connection piping member such as a damper (or a valve depending on the connection arrangement) for absorbing mechanical vibrations.
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