Method for purification of tungsten hexafluoride
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United States of America Patent
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May 24, 2005
Grant Date -
May 15, 2003
app pub date -
Dec 14, 2000
filing date -
Dec 16, 1999
priority date (Note) -
Expired
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Abstract
A method for purifying tungsten hexafluoride of high purity, capable of producing tungsten hexafluoride of higher purity than that of the related art, readily and at a low cost. A method for purifying tungsten hexafluoride of high purity, characterized in that tungsten hexafluoride containing molybdenum hexafluoride as an impurity, makes contact with a layer, in which a metal or an alloy is packed, containing at least one of molybdenum, tungsten, copper, nickel, iron, cobalt, zinc, titanium, aluminum, calcium, and magnesium at a temperature ranging from 0° C. to 100° C.
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